The use of renewable energy is the fundamental solution to the depletion of fossil fuels and global warming. The application of high technology to promote the application of renewable energy and the protection of the environment will be the main theme of future industrial and economic development. Vacuum technology is the core of the photovoltaic (solar) industry. One of the technologies, it is widely used in substrate manufacturing, thin film deposition and battery packaging processes. At the same time, the photovoltaic industry's demand for glass substrates and organic substrates also puts forward higher requirements for vacuum technology. This article introduces Vacuum pumps in the photovoltaic industry must meet some requirements. In the silicon substrate photovoltaic technology, the deposition of SiN anti-reflection film can use sputtering or PECVD process. The finished product of encapsulating silicon solar cells or glass substrates needs to use a lamination process.